MAK 649E - Micro Electro-Mech. Sensors

Course Objectives

1. Give principles of MEMS fabrication technology
2. The characteristics of materials, system and working principles of sensors in micro scale is given
3. Methods and approaches for MEMS design is given as well.

Course Description

MEMS fabrication technology. Surface micromachining. Bulk micromachining. Polymer micromachining. Dopig, PVD and CVD techniques. Use of materials in MEMS technology. Scaling issues. Case studies in fabrication. Reliability of MEMS sensors. Multi-wafer fabrication technology and fabrication options. MEMS packaging.