Dersin Bilgileri

Dersin Adı	Türkçe	Mikroelektromekanik sistemlere giriş
	İngilizce	Intr.to Micro-Elec.-Mech.Syst.
Dersin Kodu	IML 467E	Kredi	Ders (saat/hafta)	Uygulama (saat/hafta)	Labratuvar (saat/hafta)
Dönem	-	3	3	-	-
Dersin Dili		İngilizce
Dersin Koordinatörü		Levent Trabzon
Dersin Amaçları		1. Introduce basic techniques used in manufacturing micro-sensors 2. Introduce different mechanical sensors and understand their sensing mechanisms as well as their manufacturing techniques 3. Design a mechanical sensor in micro scale
Dersin Tanımı		Basic silicon-based micro fabrication. Bulk and surface micro machining. Basics of mechanial sensors. Diaphragms and Membranes. Force and Pressure Sensors. Acceleration and Angular Rate Sensors. Flow sensors. Resonant Sensors. Electronic Interfacing. Packaging.
Dersin Çıktıları		1. Students will be able to learn basic manufacturing techniques in Si- based MEMS technology 2. Students will be able to understand sensing mechanisms in micro-scale 3. Students will be able to learn how to manufacture micro-mechanical sensors 4. Students will be able to design a micro-mechanical sensor for mechanical engineering applications
Önkoşullar
Gereken Olanaklar
Diğer
Ders Kitabı		MEMS and Microsystems by Tai-Ran HSU
Diğer Referanslar		Introduction to Micro Electromechanical Devices and Systems by Chang Liu