IML 467E - Intr.to Micro-Elec.-Mech.Syst.

Course Objectives

1. Introduce basic techniques used in manufacturing micro-sensors
2. Introduce different mechanical sensors and understand their sensing mechanisms as well as their manufacturing techniques
3. Design a mechanical sensor in micro scale

Course Description

Basic silicon-based micro fabrication. Bulk and surface micro machining.
Basics of mechanial sensors. Diaphragms and Membranes. Force and Pressure Sensors. Acceleration and Angular Rate Sensors. Flow sensors. Resonant Sensors. Electronic Interfacing. Packaging.