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Dersin Bilgileri

Dersin Adı
Türkçe Mikroelektromekanik sistemlere giriş
İngilizce Intr.to Micro-Elec.-Mech.Syst.
Dersin Kodu
IML 467E Kredi Ders
(saat/hafta)
Uygulama
(saat/hafta)
Labratuvar
(saat/hafta)
Dönem -
3 3 - -
Dersin Dili İngilizce
Dersin Koordinatörü Levent Trabzon
Dersin Amaçları 1. Introduce basic techniques used in manufacturing micro-sensors
2. Introduce different mechanical sensors and understand their sensing mechanisms as well as their manufacturing techniques
3. Design a mechanical sensor in micro scale
Dersin Tanımı Basic silicon-based micro fabrication. Bulk and surface micro machining.
Basics of mechanial sensors. Diaphragms and Membranes. Force and Pressure Sensors. Acceleration and Angular Rate Sensors. Flow sensors. Resonant Sensors. Electronic Interfacing. Packaging.
Dersin Çıktıları 1. Students will be able to learn basic manufacturing techniques in Si- based MEMS technology
2. Students will be able to understand sensing mechanisms in micro-scale
3. Students will be able to learn how to manufacture micro-mechanical sensors
4. Students will be able to design a micro-mechanical sensor for mechanical engineering applications
Önkoşullar
Gereken Olanaklar
Diğer
Ders Kitabı MEMS and Microsystems by Tai-Ran HSU
Diğer Referanslar Introduction to Micro Electromechanical Devices and Systems by Chang Liu
 
 
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