Welcome,
Guest
.
Login
.
Türkçe
NİNOVA
COURSES
HELP
ABOUT
Where Am I:
Ninova
/
Courses
/
Institute of Science and Technology
/
MAK 649E
/
Course Informations
Return to Faculty
Home Page
Course Information
Course Weekly Lecture Plan
Course Evaluation Criteria
Course Information
Course Name
Turkish
MikroElektro Mekanik Sensörler
English
Micro Electro-Mech. Sensors
Course Code
MAK 649E
Credit
Lecture
(hour/week)
Recitation
(hour/week)
Laboratory
(hour/week)
Semester
-
3
3
-
-
Course Language
English
Course Coordinator
Levent Trabzon
Course Objectives
1. Give principles of MEMS fabrication technology
2. The characteristics of materials, system and working principles of sensors in micro scale is given
3. Methods and approaches for MEMS design is given as well.
Course Description
MEMS fabrication technology. Surface micromachining. Bulk micromachining. Polymer micromachining. Dopig, PVD and CVD techniques. Use of materials in MEMS technology. Scaling issues. Case studies in fabrication. Reliability of MEMS sensors. Multi-wafer fabrication technology and fabrication options. MEMS packaging.
Course Outcomes
1. To learn MEMS fabrication techniques
2. To learn MEMS design principles
3. Methodology of choosing in materials and fabrication techniques for MEMS sensor
4. Steps of MEMS sensor fabrication from design to packaging
Pre-requisite(s)
Required Facilities
Other
Textbook
MEMS and microsystems : design and manufacture, Tai-Ran Hsu, MacGraw Hill, 2001
Other References
1.The MEMS handbook, edited by Mohamed Gad-el-Hak, CRC Press, 2001 2. Microsystem Design, Stephen D. Senturia, Springer, 2000
Courses
.
Help
.
About
Ninova is an ITU Office of Information Technologies Product. © 2024