Course Information

Course Name	Turkish	MikroElektro Mekanik Sensörler
	English	Micro Electro-Mech. Sensors
Course Code	MAK 649E	Credit	Lecture (hour/week)	Recitation (hour/week)	Laboratory (hour/week)
Semester	-	3	3	-	-
Course Language		English
Course Coordinator		Levent Trabzon
Course Objectives		1. Give principles of MEMS fabrication technology 2. The characteristics of materials, system and working principles of sensors in micro scale is given 3. Methods and approaches for MEMS design is given as well.
Course Description		MEMS fabrication technology. Surface micromachining. Bulk micromachining. Polymer micromachining. Dopig, PVD and CVD techniques. Use of materials in MEMS technology. Scaling issues. Case studies in fabrication. Reliability of MEMS sensors. Multi-wafer fabrication technology and fabrication options. MEMS packaging.
Course Outcomes		1. To learn MEMS fabrication techniques 2. To learn MEMS design principles 3. Methodology of choosing in materials and fabrication techniques for MEMS sensor 4. Steps of MEMS sensor fabrication from design to packaging
Pre-requisite(s)
Required Facilities
Other
Textbook		MEMS and microsystems : design and manufacture, Tai-Ran Hsu, MacGraw Hill, 2001
Other References		1.The MEMS handbook, edited by Mohamed Gad-el-Hak, CRC Press, 2001 2. Microsystem Design, Stephen D. Senturia, Springer, 2000