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Course Information

Course Name
Turkish Mikroelektronik Teknolojisi
English Microelectronics Technology
Course Code
EHB 427E Credit Lecture
Semester 8
3 - - -
Course Language English
Course Coordinator Mustafa Berke Yelten
Course Objectives Teaching the student
1.Properties of the materials used in microelectronic fabrication,
2.Basic process steps in CMOS and SiGe bipolar fabrication,
3.How the electrical properties of the devices are affected at each process step.
4.Scaling in microelectronics and its effects.
Course Description Brief history of the microelectronics technology. Planar technology. micro-litography. Thin films;
Evaporation, sputtering and CVD techniques. thermal oxidation of silicon. Doping techniques; diffusion,
ion implantation and epitaxy. ın process measurement and evalution techniques. Proess simulation;
SUPREM. Process design: junction isolated bipolar IC and CMOS IC fabrication processes. Packaging.
Yield analysis
Course Outcomes
Required Facilities
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