Course Information

Course Name	Turkish	Mikroelektronik Teknolojisi
	English	Microelectronics Technology
Course Code	EHB 427E	Credit	Lecture (hour/week)	Recitation (hour/week)	Laboratory (hour/week)
Semester	8	3	-	-	-
Course Language		English
Course Coordinator		Mustafa Berke Yelten
Course Objectives		Teaching the student 1.Properties of the materials used in microelectronic fabrication, 2.Basic process steps in CMOS and SiGe bipolar fabrication, 3.How the electrical properties of the devices are affected at each process step. 4.Scaling in microelectronics and its effects.
Course Description		Brief history of the microelectronics technology. Planar technology. micro-litography. Thin films; Evaporation, sputtering and CVD techniques. thermal oxidation of silicon. Doping techniques; diffusion, ion implantation and epitaxy. ın process measurement and evalution techniques. Proess simulation; SUPREM. Process design: junction isolated bipolar IC and CMOS IC fabrication processes. Packaging. Yield analysis
Course Outcomes
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