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Course Information

Course Name
Turkish Mikroelektromekanik sistemlere giriş
English Intr.to Micro-Elec.-Mech.Syst.
Course Code
IML 467E Credit Lecture
Semester -
3 3 - -
Course Language English
Course Coordinator Levent Trabzon
Course Objectives 1. Introduce basic techniques used in manufacturing micro-sensors
2. Introduce different mechanical sensors and understand their sensing mechanisms as well as their manufacturing techniques
3. Design a mechanical sensor in micro scale
Course Description Basic silicon-based micro fabrication. Bulk and surface micro machining.
Basics of mechanial sensors. Diaphragms and Membranes. Force and Pressure Sensors. Acceleration and Angular Rate Sensors. Flow sensors. Resonant Sensors. Electronic Interfacing. Packaging.
Course Outcomes 1. Students will be able to learn basic manufacturing techniques in Si- based MEMS technology
2. Students will be able to understand sensing mechanisms in micro-scale
3. Students will be able to learn how to manufacture micro-mechanical sensors
4. Students will be able to design a micro-mechanical sensor for mechanical engineering applications
Required Facilities
Textbook MEMS and Microsystems by Tai-Ran HSU
Other References Introduction to Micro Electromechanical Devices and Systems by Chang Liu
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