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MKM 603E - Optical Microsystems

Course Objectives

1.Teaching types, fundamentals, added value and application fields of Optical Microsystem devices,
2.Clarification via discussion of functionalities and fundamentals of commercial and research-phase devices utilizing Optical Microsystems technology and approach,
3.Summarizing design and fabrication processes of optics, microelectronics and microfabrication fields used in realization of such devices and systems from the point of view of Optical Microsystems,
4.Transferring how the decision making approach set based on evaluation of such constraints achievable in terms of functionality, technical specifications, manufacturability, and comparing those with respect to the alternative technologies and deciding on a method for the application under consideration.

Course Description

Introduction to Optical Microsytems. Fundamental Optical Functions and Devices: Reflective, Refractive, Diffractive, Waveguiding, and Coupling. Microfabrication Technologies: Deposition, Lithography, Etching and Device Release. Imaging and Characterization Methods and Tools in Micro/Nano Realms. Microelectronics Devices and Electro-Optics. Devices based on Micro-Electromechanical-Systems (MEMS) Technology and Fields of Application. Optical Microsystems: Actuators, Light Sources, Sensors and Imagers, Optical Switches and Attenuators, Micro-mirror Scanners and MOEMS Displays.

Course Coordinator
Erdal Bulğan
Erdal Bulğan
Course Language
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