Course Information

Course Name	Turkish	Optik Mikrosistemler
	English	Optical Microsystems
Course Code	MKM 603E	Credit	Lecture (hour/week)	Recitation (hour/week)	Laboratory (hour/week)
Semester	1	3	3	-	-
Course Language		English
Course Coordinator		Erdal Bulğan Erdal Bulğan
Course Objectives		1.Teaching types, fundamentals, added value and application fields of Optical Microsystem devices, 2.Clarification via discussion of functionalities and fundamentals of commercial and research-phase devices utilizing Optical Microsystems technology and approach, 3.Summarizing design and fabrication processes of optics, microelectronics and microfabrication fields used in realization of such devices and systems from the point of view of Optical Microsystems, 4.Transferring how the decision making approach set based on evaluation of such constraints achievable in terms of functionality, technical specifications, manufacturability, and comparing those with respect to the alternative technologies and deciding on a method for the application under consideration.
Course Description		Introduction to Optical Microsytems. Fundamental Optical Functions and Devices: Reflective, Refractive, Diffractive, Waveguiding, and Coupling. Microfabrication Technologies: Deposition, Lithography, Etching and Device Release. Imaging and Characterization Methods and Tools in Micro/Nano Realms. Microelectronics Devices and Electro-Optics. Devices based on Micro-Electromechanical-Systems (MEMS) Technology and Fields of Application. Optical Microsystems: Actuators, Light Sources, Sensors and Imagers, Optical Switches and Attenuators, Micro-mirror Scanners and MOEMS Displays.
Course Outcomes		M.Sc./Ph.D. students who successfully pass this course gain knowledge, skill and competency in the following subjects; 1.General features of Optical Microsystems, 2.Functionality, fabrication, imaging and characterization of Optical Microsystems, 3.Types, technologies and limits of standard optical sensors used widely in general in engineering, and specifically in mechatronics systems, 4.If needed, design and contact with the manufacturers of non-standard microsytems in order to comply with the specs of a defined projects, 5.Optical applications of micro-scaled mechatronics systems.
Pre-requisite(s)
Required Facilities
Other
Textbook
Other References		-Solgaard, O., 2010: Photonic Microsystems: Micro and Nanotechnology Applied to Optical Devices and Systems, Springer, New York, NY, USA. -Liu, A-Q., 2008: Photonic MEMS Devices: Design, Fabrication and Control, CRC Press, New York, NY, USA. -Motamedi, M. E., 2005: MOEMS: Micro-Opto-Electro-Mechanical Systems, SPIE Press Monograph, vol. PM126, Bellingham, WA, USA. -Rai-Choudhury, P., 2000: MEMS and MOEMS Technology and Applications, SPIE Press Monograph, vol. PM85, Bellingham, WA, USA. -Liu, C., 2011: Foundations of MEMS, 2nd Edition, Prentice Hall, Upper Saddle River, NJ, USA. -Franssila, S., 2010: Introduction to Microfabrication, 2nd Edition, John Wiley & Sons, Ltd., West Sussex, UK.

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