Course Information

Course Name	Turkish	Mikro Ölçekli Isı Geçişi
	English	Micro Scale Heat Transfer
Course Code	MAK 602E	Credit	Lecture (hour/week)	Recitation (hour/week)	Laboratory (hour/week)
Semester	-	3	3	-	-
Course Language		English
Course Coordinator		Lütfullah Kuddusi
Course Objectives		1. To present general knowledge about MEMS and fluid and heat transport in MEMS. 2. To teach the physical fundamentals of miniaturization. 3. To provide the ability of applying the conventional fluid dynamics knowledge to the miniature systems. 4. To introduce solutions in micro scale for the problem of mal distribution of flow in engineering systems..
Course Description		Basics of MEMS. Working principles of valves, pumps, and fluidics in microsystems. Scaling in acceleration, time, power, power density. Scaling in electrostatic forces. Scaling in fluidics and heat transfer. Diffusion processes in MEMS design. Surface tension. Capillary effect. Micropumping. Rarefied gas. Knudsen number. Microgas flow. Heat conduction in submicrometer scale.Electronic cooling. Flow distribution in mini/micro channel manifolds.
Course Outcomes		Students who pass the course will be able to: 1. Apply basic principles and terminology of MEMS, (a) 2. Design basic fluidics systems, (c) 3. To develop projects for MEMS or use MEMS in macro scale projects, (e) 4. Apply conventional fluid dynamics laws for micro scales, (e) 5. Define the system in any problem. (e)
Pre-requisite(s)		MAK311 ve AKM205
Required Facilities
Other
Textbook		1- MEMS & microsystems: design and manufacture, T-R. Hsu, McGraw-Hill, 2002 2- Yarin LP, Mosyak A, Hetsroni G, Thermohydrodynamic processes in micro-channels: fluid flow, heat-mass transfer and boiling, Berlin ; London Springer, 2008
Other References		The MEMS handbook / edited by Mohamed Gad-el-Hak, Boca Raton, FL : CRC Press, 2002 Karniakadis GE, Beskok A., Micro flows : fundamentals and simulation, New York : Springer, 2002 Bao, M., Analysis and Design Principles of MEMS Devices , Elsevier, 2005

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